材料....................................................CAF2(單晶、多晶） 尺寸公差..................................................±0.1 定向精度...................................................... 0.2° 平面度........................................................λ/4波前畸變...........................................................λ/8 @632.8nm平行度.............................................................< 30″ 有效孔徑...................................................................> 90%光潔度.......................................................................20-10 崩邊...............................................................< 0.02mm